Welcome to ETH World
English Deutsch

ETH World 2000-2005

The ETH World program came to an end in 2005. This website is no longer updated and contains archival information about the activities.


Arbeitsgruppe Mechatronik, D-MAVT
Projekttyp: e-Learning
Keywords: Group oriented hands-on practical lab, Acquisition of cutting edge technology, Thin film processes, Super critical point drying, Submicron structures, Silicon Process Technology, Plasma assisted high aspect ratio etching, Picofarad capacitive readout, Microsystem Technology, MEMS, Highly parallel processing, Cleanroom technology

The "Embedded MEMS Lab", designed and implemented by the Chair of Micro- and Nanosystems, is a laboratory course in micro-electro-mechanical systems. It constitutes a major contribution to the teaching activities at ETH Zurich by providing a missing link in the growing field of micro and nanosystems technology.

The course will provide advanced students from the departments of Mechanical and Process Engineering, Physics, and Information Technology and Electrical Engineering with expertise guidance so that they are able to process and fabricate a micromechanical system with readout electronics on their own. The course is highly motivating for the students as they gain experience in an important future technology where interdisciplinary and teamwork skills are in high demand. The course will also stand out in comparison with the offers from other leading universities.

2003/02/01 Project start
2003/06/01 Festlegen des Praktikumszieles
2004/02/01 Erstellte Systeme getestet und geprüft
2004/03/01 Anzahl: Teilnehmer (prozesslimitiert)
2004/07/31 Praktikum 2004
2005/10/31 Project end


Wichtiger Hinweis:
Diese Website wird in älteren Versionen von Netscape ohne graphische Elemente dargestellt. Die Funktionalität der Website ist aber trotzdem gewährleistet. Wenn Sie diese Website regelmässig benutzen, empfehlen wir Ihnen, auf Ihrem Computer einen aktuellen Browser zu installieren. Weitere Informationen finden Sie auf
folgender Seite.

Important Note:
The content in this site is accessible to any browser or Internet device, however, some graphics will display correctly only in the newer versions of Netscape. To get the most out of our site we suggest you upgrade to a newer browser.
More information

© 2012 ETH Zurich | Imprint | Disclaimer | 5 July 2005